Shear mode bulk acoustic wave type gyroscope based on c-axis tilted ScAlN piezoelectric films

被引：0
|
作者：
Matsumura, Momoka [1 ]
Koike, Yuna [1 ]
Seki, Ryo [1 ]
Yanagitani, Takahiko [1 ,2 ,3 ,4 ]
机构：
[1] Waseda Univ, Tokyo, Japan
[2] ZAIKEN, Tokyo, Japan
[3] JST CREST, Tokyo, Japan
[4] JST FOREST, Tokyo, Japan
来源：
2023 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL | 2023年
关键词：
BAW; piezoelectric gyroscope; shear wave; ScAlN;
D O I：
10.1109/INERTIAL56358.2023.10104023
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Transmission and detection type piezoelectric gyroscope with two c-axis tilted ScAlN films are fabricated. By adjusting the in-plane tilt angles to 90 degrees, the polarities of shear wave generated at upper layer (input) cannot be detected at lower layer (output) at a still state. However, due to the Coriolis force, the in-plane rotation of shear wave polarity can be detected when the device is rotated. The transmission and detection type gyroscope device was simulated using Mason's equivalent circuit model.
引用
收藏
页数：3
相关论文
共 50 条
  • [21] Microstructure and piezoelectric properties of c-axis ScAlN films on the Y-128° LiNbO3 substrate
    Chen, Pin-Hung
    Wu, Sean
    Chen, Yi-Chun
    Huang, Jow-Lay
    Lii, Ung Fwu
    Lin, Zhi-Xun
    SURFACE & COATINGS TECHNOLOGY, 2015, 284 : 129 - 132
  • [22] Oblique incidence ultrasonic reflectometry device based on c-axis tilted ScAlN films for evaluating viscoelastic properties of liquids above 100 MHz
    Kinoshita, Sarina
    Yanagitani, Takahiko
    APPLIED PHYSICS LETTERS, 2022, 121 (15)
  • [23] c-Axis tilted ScA1N film shear mode resonators for biosensing
    Yazaki, Hana
    Soutome, Takumi
    Karasawa, Rei
    Takayanagi, Shinji
    Yoshida, Kenji
    Yanagitani, Takahiko
    2018 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2018,
  • [24] Growth of highly c-axis textured AIN films on Mo electrodes for film bulk acoustic wave resonators
    Lee, SH
    Lee, JK
    Yoon, KH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (01): : 1 - 5
  • [25] High-overtone mode bulk acoustic wave resonators based on polarization inverted multilayer SiAlN/ScAlN films
    Fukunaga, Kei
    Suzuki, Masashi
    Kakio, Shoji
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2025, 64 (02):
  • [26] Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients
    Matsuo, Takuya
    Yanagitani, Takahiko
    Matsukawa, Mami
    Watanabe, Yoshiaki
    2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 1229 - +
  • [27] Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators
    Bjurström, J
    Wingqvist, G
    Katardjiev, I
    2005 IEEE Ultrasonics Symposium, Vols 1-4, 2005, : 321 - 324
  • [28] BROADBAND FREQUENCY VISCOSITYMEASUREMENT USING LOW TCF SHEAR MODE RESONATORS CONSISTING OF C-AXIS TILTED SCALN THIN FILM ON THICK AT-CUT QUARTZ PLATE
    Yamakawa, Y.
    Sano, K.
    Karasawa, R.
    Yanagitani, T.
    2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 2135 - 2138
  • [29] Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonators
    Bjurstrom, Johan
    Wingqvist, Gunilla
    Katardjiev, Ilia
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (11) : 2095 - 2100
  • [30] Growth and characterization of c-axis inclined AlN films for shear wave devices
    Fardeheb-Mammeri, A.
    Assouar, M. B.
    Elmazria, O.
    Fundenberger, J-J
    Benyoucef, B.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2008, 23 (09)
12345