Shear mode bulk acoustic wave type gyroscope based on c-axis tilted ScAlN piezoelectric films

被引：0
|
作者：
Matsumura, Momoka [1 ]
Koike, Yuna [1 ]
Seki, Ryo [1 ]
Yanagitani, Takahiko [1 ,2 ,3 ,4 ]
机构：
[1] Waseda Univ, Tokyo, Japan
[2] ZAIKEN, Tokyo, Japan
[3] JST CREST, Tokyo, Japan
[4] JST FOREST, Tokyo, Japan
来源：
2023 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL | 2023年
关键词：
BAW; piezoelectric gyroscope; shear wave; ScAlN;
D O I：
10.1109/INERTIAL56358.2023.10104023
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Transmission and detection type piezoelectric gyroscope with two c-axis tilted ScAlN films are fabricated. By adjusting the in-plane tilt angles to 90 degrees, the polarities of shear wave generated at upper layer (input) cannot be detected at lower layer (output) at a still state. However, due to the Coriolis force, the in-plane rotation of shear wave polarity can be detected when the device is rotated. The transmission and detection type gyroscope device was simulated using Mason's equivalent circuit model.
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页数：3
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