Effect of laser irradiation on RF-sputtered antimony sulfide thin films

被引:1
|
作者
Collado-Hernandez, A. [1 ]
Garcia-Mendez, M. [1 ]
Mendivil-Palma, M. I. [2 ]
Gomez-Rodriguez, C. [3 ]
Fernandez-Gonzalez, D. [4 ]
Garcia-Quinonez, L. V. [5 ]
机构
[1] Univ Autonoma Nuevo Leon, Fac Phys & Math, San Nicolas De Los Garza 66455, Nuevo Leon, Mexico
[2] CIMAV, Unidad Monterrey, Alianza Norte 202, Apodaca 66600, Nuevo Leon, Mexico
[3] Univ Veracruzana, Fac Ingn, Dept Mecan, Ave Univ Km 7-5,Col St Isabel I, Coatzacoalcos 96538, Veracruz, Mexico
[4] Univ Oviedo UO, Nanomat & Nanotechnol Res Ctr CINN CSIC, Principado Asturias PA, Avda Vega 4-6, El Entrego 33940, Spain
[5] Univ Veracruzana, Ctr Invest Recursos Energet & Sustentables CIRES, Ave Univ Veracruzana Km 7-5,Col St Isabel I, Coatzacoalcos 96538, Veracruz, Mexico
关键词
Antimony sulfide; Thin films; Magnetron sputtering; Laser treatment; SB2S3; CRYSTALLIZATION;
D O I
10.1016/j.vacuum.2023.111925
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
One of the drawbacks of Sb2S3 thin films is the lack of crystallinity if no thermal treatment is applied. The interest for the development of crystallinity is to improve their properties. Thus, laser irradiation could provide sufficient energy to improve the crystallinity in the above-indicated material. In this work, Radio Frequency (RF)-sputtered Sb2S3 thin films were irradiated with a continuous CO2 laser. Laser treated samples showed crystallization corresponding to the stibnite phase (Sb2S3). Furthermore, the morphology of the sample changed from a cracked surface (before irradiation) to a more dense/homogeneous film (after irradiation). The structural and morpho-logical changes induced by laser irradiation tend to improve the optical and electrical properties aside the crystalline one. When the sample was treated with laser, an increase in optical and photoconductivity properties were detected. The results presented here demonstrate the possibility of improving the quality of Sb2S3 films when a far-infrared laser is applied.
引用
收藏
页数:6
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