Selective area growth of high quality GaN nanocolumns on Si(001) by plasma assisted molecular beam epitaxy

被引:0
|
作者
Bengoechea-Encabo, Ana [1 ,2 ]
Albert, Steven [2 ]
Niehle, Michael [3 ]
Trampert, Achim [3 ]
Calleja, Enrique [2 ]
机构
[1] TianRui Semicond Mat Co Ltd, Third Zone Datong rd 20, Suzhou 215151, Peoples R China
[2] Univ Politecn Madrid, Inst Sistemas Optoelect & Microelect ISOM, ETSI Telecomunicac, Av Complutense 30,Ciudad Univ, Madrid 28040, Spain
[3] Paul Drude Inst Festko perelektron, Leibniz Inst Forschungsverbund Berlin e V, Hausvogteipl 5-7, D-10117 Berlin, Germany
关键词
A1; Nanostructures; A3. Molecular beam epitaxy; B1; Nitrides; LIGHT-EMITTING-DIODES; NANOWIRES; LAYERS; NUCLEATION; MORPHOLOGY; SILICON; SI;
D O I
10.1016/j.jcrysgro.2023.127367
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Two different arrays of GaN nanocolumns, with average diameters of 140 nm and 260 nm, were selectively grown by molecular beam epitaxy on GaN-buffered on-axis Si(0 0 1) substrates. Footprint of the nanocolumns with respect to the grain size of the GaN buffer layer plays and important role on the crystalline quality of the nanocolumnar material. Despite the rather low crystalline quality of the GaN buffer, very high quality GaN nanocolumns were achieved in the case of the array with 140 nm average diameter, as indicated from a low temperature photoluminescence donor-bound exciton linewidth of 1.9 meV and negligible densities of stacking faults and threading dislocations determined by transmission electron microscopy. These results may help to the integration of GaN-based nano-devices with the conventional Si(0 0 1) electronics platform.
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页数:6
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