GaN nanocolumns on Si(III) grown by molecular beam epitaxy

被引:0
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作者
Calarco, R [1 ]
Marso, K [1 ]
Meijers, R [1 ]
Richter, T [1 ]
Aykanat, AI [1 ]
Stoica, T [1 ]
Lüth, H [1 ]
机构
[1] ISGI, D-52425 Julich, Germany
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
GaN nanocolumns are reproducibly grown by Plasma-assisted molecular beam epitaxy on Si(111). The nanocolumn density and diameter, 20-150 nm, are controlled by means of the III/V ratio. The nanocolumns grow parallel to the [111] direction of the Si substrate. The columns have been transferred to a Si(100) substrate covered with a layer of 300nm SiO2. Single nanowire devices have been fabricated using finger shaped electrical contacts (Ti/Au) obtained by e-beam patterning technique. The electrical transport properties of the resulting metal-semiconductor-metal nanostructures are analyzed by means of current-voltage measurements in dark and under UV-illumination.
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页码:9 / 12
页数:4
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