Effect of interface on oxidation behavior and tribological properties of CrAlN/SiNx multilayer films

被引：5

作者：

He, Youxing ^{[1
,2
]}

Wang, Xiaobo ^{[3
]}

Guo, Tao ^{[1
,2
]}

Gao, Kewei ^{[1
,2
]}

Pang, Xiaolu ^{[1
,2
]}

机构：

[1] Univ Sci & Technol Beijing, Beijing Adv Innovat Ctr Mat Genome Engn, Beijing 100083, Peoples R China

[2] Univ Sci & Technol Beijing, Sch Mat Sci & Engn, State Key Lab Adv Met & Mat, Beijing 100083, Peoples R China

[3] China United Gas Turbine Technol Co Ltd, Beijing 100015, Peoples R China

来源：

CERAMICS INTERNATIONAL | 2023年 / 49卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Multilayer film; Interface; Diffusion; Oxidation resistance; Tribological properties; TIALN/SIN DECORATIVE FILMS; THERMAL-STABILITY; MECHANICAL-PROPERTIES; BOROSILICATE GLASS; THIN-FILMS; RESISTANCE; GROWTH; MICROSTRUCTURE;

D O I：

10.1016/j.ceramint.2022.09.118

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The oxidation resistance and tribological behavior of CrAlN/SiNx multilayer films with different interface structures were investigated. The multilayer film exhibited better oxidation resistance than the monolithic CrAlN film after oxidation at 900 degrees C and 1000 degrees C for 10 h. The crystalline SiNx sublayer was beneficial to oxidation resistance at 900 degrees C in contrast to the trend observed after oxidation at 1000 degrees C. The stacking faults generated in the multilayer film were induced by the oxidation of SiNx. The diffusion mechanism changed from the outward diffusion of cations to an inward diffusion of anions when the temperature was increased to 1000 degrees C. The multilayer film with a crystalline interface exhibited lower coefficient of friction (COF) and better tribological properties than the CrAlN film and multilayer with an amorphous interface.

引用

页码：1369 / 1380

页数：12

共 50 条

[41] Effect of Humidity on Tribological Behavior of a-C:Ti/a-C:Si Nano-multilayer Films
Zhao, Chunmei
Niu, Xinyue
Xu, Zhengtian
Wang, Shaofeng
Shi, Zhijun
Xing, Xiaolei
Zhou, Yefei
Surface Technology, 2024, 53 (21): : 34 - 43
[42] Effect of tribological media on tribological properties of multilayer Cr(N)/C(DLC) coatings
Wang, L.
Nie, X.
Lukitsch, M. J.
Jiang, J. C.
Cheng, Y. T.
SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07): : 4341 - 4347
[43] Effects of yttrium doping on high-temperature oxidation, friction, and wear properties of CrAlN films
Wang, Yuxing
Wang, Dong
MATERIALS RESEARCH EXPRESS, 2024, 11 (01)
[44] Effect of structure of carbon films on their tribological properties
Ilberg, L.
Manis-Levy, H.
Raveh, A.
Lifshitz, Y.
Varenberg, M.
DIAMOND AND RELATED MATERIALS, 2013, 38 : 79 - 86
[45] Microstructural, mechanical, oxidation resistance and tribological properties of TaMgN films
Ding, Ning
Yu, Lihua
Zuo, Bin
Xu, Junhua
Luo, Huang
Ju, Hongbo
SURFACE ENGINEERING, 2022, 38 (01) : 30 - 36
[46] Effect of magnetic field and target-substrate distance on properties of CrAlN films
Zheng J.
Mei S.
Li Z.
Liu Q.
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2023, 31 (18): : 2627 - 2635
[47] Structure, Mechanical and Tribological Properties of MoSN/MoS2 Multilayer Films
Fu, Yanlong
He, Tengfei
Yang, Wu
Xu, Jiao
Mu, Bo
Pang, Xianjuan
Wang, Peng
COATINGS, 2019, 9 (02):
[48] Enhanced tribological and corrosion properties of DLC/CrN multilayer films deposited by HPPMS
Zhao, Yanchao
Xu, Feng
Zhang, Dan
Xu, Ji
Shi, Xianqing
Sun, Shuo
Zhao, Wenxuan
Gao, Chengzuan
Zuo, Dunwen
CERAMICS INTERNATIONAL, 2022, 48 (17) : 25569 - 25577
[49] Microstructure design and tribological properties of Cr/CrN and TiN/CrN multilayer films
Major, L.
Morgiel, J.
Lackner, J. M.
Szczerba, M. J.
Kot, M.
Major, B.
ADVANCED ENGINEERING MATERIALS, 2008, 10 (07) : 617 - 621
[50] Microstructure and Tribological Behavior of Magnetron Sputtered WSx/W/DLC/W Multilayer Films
Zheng Xiaohua
Liu Tao
Yang Shuoyan
Wang Gongqi
Yang Fanger
RARE METAL MATERIALS AND ENGINEERING, 2020, 49 (04) : 1295 - 1300

← 1 2 3 4 5 →