Effect of interface on oxidation behavior and tribological properties of CrAlN/SiNx multilayer films

被引：5
|
作者：
He, Youxing [1 ,2 ]
Wang, Xiaobo [3 ]
Guo, Tao [1 ,2 ]
Gao, Kewei [1 ,2 ]
Pang, Xiaolu [1 ,2 ]
机构：
[1] Univ Sci & Technol Beijing, Beijing Adv Innovat Ctr Mat Genome Engn, Beijing 100083, Peoples R China
[2] Univ Sci & Technol Beijing, Sch Mat Sci & Engn, State Key Lab Adv Met & Mat, Beijing 100083, Peoples R China
[3] China United Gas Turbine Technol Co Ltd, Beijing 100015, Peoples R China
来源：
CERAMICS INTERNATIONAL | 2023年 / 49卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Multilayer film; Interface; Diffusion; Oxidation resistance; Tribological properties; TIALN/SIN DECORATIVE FILMS; THERMAL-STABILITY; MECHANICAL-PROPERTIES; BOROSILICATE GLASS; THIN-FILMS; RESISTANCE; GROWTH; MICROSTRUCTURE;
D O I：
10.1016/j.ceramint.2022.09.118
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The oxidation resistance and tribological behavior of CrAlN/SiNx multilayer films with different interface structures were investigated. The multilayer film exhibited better oxidation resistance than the monolithic CrAlN film after oxidation at 900 degrees C and 1000 degrees C for 10 h. The crystalline SiNx sublayer was beneficial to oxidation resistance at 900 degrees C in contrast to the trend observed after oxidation at 1000 degrees C. The stacking faults generated in the multilayer film were induced by the oxidation of SiNx. The diffusion mechanism changed from the outward diffusion of cations to an inward diffusion of anions when the temperature was increased to 1000 degrees C. The multilayer film with a crystalline interface exhibited lower coefficient of friction (COF) and better tribological properties than the CrAlN film and multilayer with an amorphous interface.
引用
收藏
页码：1369 / 1380
页数：12
相关论文
共 50 条
  • [1] Crystal interface-enhanced thermal stability of CrAlN/SiNx multilayer films
    He, Youxing
    Wang, Xiaobo
    Guo, Tao
    Gao, Kewei
    Pang, Xiaolu
    Surface and Coatings Technology, 2022, 445
  • [2] Crystal interface-enhanced thermal stability of CrAlN/SiNx multilayer films
    He, Youxing
    Wang, Xiaobo
    Guo, Tao
    Gao, Kewei
    Pang, Xiaolu
    SURFACE & COATINGS TECHNOLOGY, 2022, 445
  • [3] Effect of grain size on mechanical properties in CrAlN/SiNx multilayer coatings
    Lin, Chih-Hsiung
    Tsai, Yan-Zuo
    Duh, Jenq-Gong
    THIN SOLID FILMS, 2010, 518 (24) : 7312 - 7315
  • [4] Mechanical properties and tribological behavior of TiN-CrAlN and CrN-CrAlN multilayer coatings
    Okumiya, M
    Griepentrog, M
    SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3): : 123 - 128
  • [5] Mechanical, tribological, and oxidation properties of Si-containing CrAlN films
    Kitamika, Y.
    Hasegawa, H.
    VACUUM, 2019, 164 : 29 - 33
  • [6] Effect of Hf on the microstructure, mechanical properties, and oxidation behavior of sputtered CrAlN films
    Tillmann, Wolfgang
    Dias, Nelson Filipe Lopes
    Stangier, Dominic
    VACUUM, 2018, 154 : 208 - 213
  • [7] Effects of substrate bias voltage on mechanical properties and tribological behaviors of RF sputtered multilayer TiN/CrAlN films
    Chen, Xiao
    Xi, Yeting
    Meng, Jie
    Pang, Xiaolu
    Yang, Huisheng
    JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 665 : 210 - 217
  • [8] Effect of TiN Interface Layer on Tribological Properties of CNx Films
    Tang Liqiang
    Liu Jun
    Chen Zhigang
    Wu Yanjie
    RARE METAL MATERIALS AND ENGINEERING, 2008, 37 : 477 - 480
  • [9] Microstructure, mechanical and tribological behavior of MoNx/SiNx multilayer coatings prepared by magnetron sputtering
    Zhang, Guojun
    Fan, Tianxiang
    Wang, Tao
    Chen, Hailin
    APPLIED SURFACE SCIENCE, 2013, 274 : 231 - 236
  • [10] Mechanical and tribological properties of CrAlN-Ag self-lubricating films
    Basnyat, P.
    Luster, B.
    Kertzman, Z.
    Stadler, S.
    Kohli, P.
    Aouadi, Samir
    Xu, J.
    Mishra, S. R.
    Eryilmaz, O. L.
    Erdemir, A.
    SURFACE & COATINGS TECHNOLOGY, 2007, 202 (4-7): : 1011 - 1016
12345