Experimental Determination of the Cathode Spot Motion Parameters during the Operation of a Vacuum-Arc Evaporator with an Arched Magnetic Field

被引：0
|
作者：
Kirillov, D. V. [1 ]
Tumanov, N. A. [1 ]
Riazanov, V. A. [1 ]
Pridatkin, F. P. [1 ]
Shimlykh, P. A. [1 ]
Novikov, D. O. [1 ]
机构：
[1] Bauman Moscow State Tech Univ, Natl Res Univ, Moscow 105005, Russia
来源：
RUSSIAN METALLURGY | 2023年 / 2023卷 / 06期
关键词：
cathode spot; vacuum arc; erosion;
D O I：
10.1134/S0036029523060204
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
The dependences of the cathode spot velocity and the spot track width on the magnetic field on the cathode surface are determined. The parameters for vacuum arc evaporator cathodes made of a D16, VT1-0, or Ti-Al alloy are determined. The possibility of the influence of the parameters of the cathode zone motion on the erosion of the cathode is shown. The results obtained can be used to analyze the cathode erosion profile in arc evaporators with an arched magnetic field.
引用
收藏
页码：767 / 772
页数：6
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