Analysis of surface damage produced by pulsed laser ablation on metal Al and semiconductor Si

被引：1
|
作者：
Man Bao-Yuan
Liu Ai-Hua and Wang Xiang-Tai(Department of Physics
机构：
来源：
Nuclear Science and Techniques | 1998年 / 02期
关键词：
Laser damage; Thermal stress; Shock pressure;
D O I：
暂无
中图分类号：
TN24 [激光技术、微波激射技术];
学科分类号：
0803 ; 080401 ; 080901 ;
摘要：
The surface morphological changes produced by Nd:YAG pulsed laser ablation of metal Al and semiconductor Si were carefully examined and analyzed by using scanning electron microscope. The formation mechanism of the droplets was discussed, and the reasons for formation of the microcracks on the laser irradiated area of the target surface were analyzed by calculating the thermal stress, the vapor pressure and the shock pressure induced by the laser supported detonation.
引用
收藏
页码：98 / 101
页数：4
相关论文
共 50 条
  • [31] A damage free pulsed laser ablation source of ultrasound
    Dixon, S
    Edwards, C
    Palmer, SB
    9TH INTERNATIONAL CONFERENCE ON PHOTOACOUSTIC AND PHOTOTHERMAL PHENOMENA, CONFERENCE DIGEST, 1996, : 582 - 582
  • [32] Reaction of Al with ammonia by pulsed laser ablation: Optical analysis and mass spectrometry
    DiPalma, TM
    Flamini, C
    Orlando, S
    Teghil, R
    Guidoni, AG
    Mele, A
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 122 (03): : 423 - 426
  • [33] Binary Cluster Ions XnPm +/- (X=C, Si, B, Al) Produced by Laser Ablation
    Liu Zhaoyang
    Huang Rongbin
    Huang Feng
    Wang Chunru
    Zheng Lansun
    ACTA PHYSICO-CHIMICA SINICA, 1995, 11 (08) : 710 - 715
  • [34] Silicon supported TiC films produced by pulsed laser ablation
    D'Alessio, L
    Salvi, AM
    Teghil, R
    Marotta, V
    Santagata, A
    Brunetti, B
    Ferro, D
    De Maria, G
    APPLIED SURFACE SCIENCE, 1998, 134 (1-4) : 53 - 62
  • [35] Oxidation of uranium nanoparticles produced via pulsed laser ablation
    Trelenberg, Thomas W.
    Glade, Stephen C.
    Tobin, James G.
    Felter, Thomas E.
    Hamza, Alex V.
    ACTINIDES 2005-BASIC SCIENCE, APPLICATIONS AND TECHNOLOGY, 2006, 893 : 381 - +
  • [36] Palladium nanoparticles produced by CW and pulsed laser ablation in water
    Boutinguiza, M.
    Comesana, R.
    Lusquinos, F.
    Riveiro, A.
    del Val, J.
    Pou, J.
    APPLIED SURFACE SCIENCE, 2014, 302 : 19 - 23
  • [37] Correlation between surface oxide and photoluminescence properties of Si nanoparticles prepared by pulsed laser ablation
    Umezu, I
    Matsumoto, K
    Inada, M
    Makino, T
    Sugimura, A
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6): : 1545 - 1547
  • [38] Correlation between surface oxide and photoluminescence properties of Si nanoparticles prepared by pulsed laser ablation
    I. Umezu
    K. Matsumoto
    M. Inada
    T. Makino
    A. Sugimura
    Applied Physics A, 2004, 79 : 1545 - 1547
  • [39] Three-way metal cluster catalysts confined in zeolites produced by pulsed laser ablation in liquid
    Takeda, Yoshihiro
    Toyama, Namiki
    Egashira, Kazuhiro
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2022, 128 (11):
  • [40] Three-way metal cluster catalysts confined in zeolites produced by pulsed laser ablation in liquid
    Yoshihiro Takeda
    Namiki Toyama
    Kazuhiro Egashira
    Applied Physics A, 2022, 128
12345