A low-loss V-groove coplanar waveguide on an SOI substrate

被引：0

作者：

赵宇航 ^{[1
]}

童家榕 ^{[1
]}

曾璇 ^{[1
]}

王勇 ^{[2
]}

机构：

[1] State Key Laboratory of ASIC & System Microelectronics Department, Fudan University

[2] Shanghai IC Research and Development Center

来源：

半导体学报 | 2009年 / 30卷 / 07期

关键词：

SOI; coplanar waveguide; low loss; radio frequency;

D O I：

暂无

中图分类号：

TN818 [光纤传输线、光缆];

学科分类号：

0803 ;

摘要：

A novel low-loss 50-Ω coplanar waveguide with V-groove on an SOI substrate is proposed.Through a CMOS-compatible process and anisotropic etching of silicon, surface silicon is removed from the SOI.The measured results show that the V-groove coplanar waveguide causes about 50% less loss than the conventional one at a high frequency of up to 40 GHz.

引用

页码：49 / 51

页数：3

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