STUDIES　ON　HOMOGENEOUS　SCAVENG　REACTION　IN　　CONFINED　ETCHANT　LAYER　TECHNIQUE　FOR　NANOLITHOGRAPHY　（I）　──As　（III）　SCAVENGING　BROMINE　REACTION

被引：0

|

作者：

Lian Yong SU

Jin LUO

Zhong Hua LIN

Zhao Wu TIAN (The State Key Laboratory for Physical Chemistry of the Solid Surface

机构：

来源：

Chinese Chemical Letters | 1995年 / 03期

关键词：

保保; 悖悖; BROMINE; CONFINED; ETCHANT; HOMOGENEOUS; LAYER; NANOLITHOGRAPHY; ON; REACTION; SCAVENG; SCAVENGING; STUDIES; TECHNIQUE; III; As;

D O I：

暂无

中图分类号：

O613.63 [砷As];

学科分类号：

070301 ; 081704 ;

摘要：

ＳＴＵＤＩＥＳＯＮＨＯＭＯＧＥＮＥＯＵＳＳＣＡＶＥＮＧＩＮＧＲＥＡＣＴＩＯＮＩＮＣＯＮＦＩＮＥＤＥＴＣＨＡＮＴＬＡＹＥＲＴＥＣＨＮＩＱＵＥＦＯＲＮＡＮＯＬＩＴＨＯＧＲＡＰＨＹ（Ｉ） ──Ａｓ（ＩＩＩ）ＳＣＡＶＥＮＧＩＮＧ ...

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页码：243 / 246

页数：4

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