STUDIES　ON　HOMOGENEOUS　SCAVENG　REACTION　IN　　CONFINED　ETCHANT　LAYER　TECHNIQUE　FOR　NANOLITHOGRAPHY　（I）　──As　（III）　SCAVENGING　BROMINE　REACTION

被引：0
|
作者：
Lian Yong SU
Jin LUO
Zhong Hua LIN
Zhao Wu TIAN (The State Key Laboratory for Physical Chemistry of the Solid Surface
机构：
来源：
Chinese Chemical Letters | 1995年 / 03期
关键词：
保保; 悖悖; BROMINE; CONFINED; ETCHANT; HOMOGENEOUS; LAYER; NANOLITHOGRAPHY; ON; REACTION; SCAVENG; SCAVENGING; STUDIES; TECHNIQUE; III; As;
D O I：
暂无
中图分类号：
O613.63 [砷As];
学科分类号：
070301 ; 081704 ;
摘要：
ＳＴＵＤＩＥＳ ＯＮ ＨＯＭＯＧＥＮＥＯＵＳ ＳＣＡＶＥＮＧ ＩＮＧＲＥＡＣＴＩＯＮ ＩＮ ＣＯＮＦＩＮＥＤ ＥＴＣＨＡＮＴ ＬＡＹＥＲ ＴＥＣＨＮＩＱＵＥ ＦＯＲ ＮＡＮＯＬＩＴＨＯＧＲＡＰＨＹ （Ｉ） ──Ａｓ （ＩＩＩ） ＳＣＡＶＥＮＧＩＮＧ ...
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页码：243 / 246
页数：4
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