[1] Chinese Academy of Science
[2] Department of Information & Electronic Engineering Zhejiang University
[3] Department of Information & Electronic Engineering Zhejiang University
[4] Hangzhou 310027
[5] Shanghai 200050
[6] Shanghai Institute of Microsystem & Information Technology
[7] State Key Laboratories of Transducer Technology
[8] State Key Laboratories of Transducer Technology Shanghai Institute of Microsystem & Information Technology
[9] State Key Laboratories of Transducer Technology Shanghai Institute of Microsystem & Information Technology