ROLE OF SURFACE TOPOGRAPHY ON ANGULAR DISTRIBUTION OF SPUTTERED Cd ATOMS

被引：0

作者：

王震遐

潘冀生

章骥平

陶振兰

机构：

[1] Institute of Nuclear Research Academia Sinica Shanghai 201800 China

[2] Institute of Nuclear Research Academia Sinica Shanghai 201800 China

来源：

NuclearScienceandTechniques | 1993年 / 02期

基金：

中国国家自然科学基金;

关键词：

Sputtering Angular distribution Topography;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The angular distributions of sputtered Cd atoms were measured with 27 keV Ar+ ion bombardment at normal incidence for different target temperatures by using collector technique and RBS analysis. After the sputtering experiment the surface structures were observed using scanning electron microscope. For all samples the angular distributions are over-cosine. But the exponent n from fits of cosn θ to experimental angular distributions changes with target temperature. A simple model is proposed to explain the relation between shape of angular distribution and topography of sputtered surface.

引用

页码：74 / 79

页数：6

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