Mesa Diaphragm-Based Fabry-Perot Optical MEMS Pressure Sensor

被引：0
|
作者：
Yi-Xian Ge
机构：
来源：
Journal of Electronic Science and Technology | 2008年 / 6卷 / 04期
关键词：
Fabry-Perot interference; micro electron mechanical system; mesa structure; optical fiber sens or; parallelism;
D O I：
暂无
中图分类号：
TP212 [发送器（变换器）、传感器];
学科分类号：
080202 ;
摘要：
An optical micro electron mechanical system (MEMS) pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot (F-P) interference and the relation between deflection and pressure is analyzed. Both the mechanical model of the mesa structure diaphragm and the signal averaging effect is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the parallelism and can reduce the signal averaging effect. Experimental results demonstrate that the mesa structure sensor has a reasonable linearity and sensitivity.
引用
收藏
页码：466 / 469
页数：4
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