Instability of nc-Si: H Films Fabricated by PECVD

被引：0
|
作者：
QIANG Wei
机构：
来源：
SemiconductorPhotonicsandTechnology | 1999年 / 01期
关键词：
Conductivity; Instability; Nanocrystalline Silicon Film;
D O I：
暂无
中图分类号：
TN304.055 [];
学科分类号：
摘要：
１ＩｎｔｒｏｄｕｃｔｉｏｎＴｈｅｍｅｔｈｏｄｏｆｇｌｏｗｄｉｓｃｈａｒｇｅｕｓｉｎｇｈｉｇｈｌｙｈｙｄｒｏｇｅｎ－ｄｉｌｕｔｅｄｓｉｌａｎｅａｓｒｅａｃｔｉｖｅｇａｓ（ａｎｄｉｎｓｏｍｅｃａｓｅｓ，ａｎｅｇａｔｉｖｅｂｉａｓｏｎｔｈｅｓｕｂｓｔｒａｔ...
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页码：41 / 44
页数：4
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