A multivariate process capability index with a spatial coefficient

被引：0
|
作者：
王少熙 [1 ]
王明辛 [1 ]
樊晓桠 [1 ]
张盛兵 [1 ]
韩茹 [1 ]
机构：
[1] School of Software and Microelectronics,Northwestern Polytechnical University
来源：
Journal of Semiconductors | 2013年 / 34卷 / 02期
关键词：
process; process capability index; multivariate; off-center;
D O I：
暂无
中图分类号：
O211.3 [分布理论];
学科分类号：
020208 ; 070103 ; 0714 ;
摘要：
After analyzing the multivariate Cpm method(Chan et al.1991),this paper presents a spatial multivariate process capability index(PCI) method,which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.
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页码：129 / 132
页数：4
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