Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint

被引:0
|
作者
郭慧晶 [1 ]
张校亮 [1 ]
李晓春 [1 ]
机构
[1] Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education and Shanxi Province,Colleges of Physics and Optoelectronics, Taiyuan University of Technology
基金
中国国家自然科学基金;
关键词
and nano-scale patterns based on optical discs and nanoimprint; Fabrication of ordered micro;
D O I
暂无
中图分类号
TB383.1 [];
学科分类号
070205 ; 080501 ; 1406 ;
摘要
A simple method to fabricate one-dimensional(1-D) and two-dimensional(2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane(PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate(PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters.
引用
收藏
页码:241 / 244
页数:4
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