A Practical Pll-Based Drive Circuit with Ultra-Low-Noise Tia for Mems Gyroscope

被引：3

作者：

CHEN Hua ^{[1
]}

ZHONG Yanqing ^{[1
]}

MENG Zhen ^{[1
]}

机构：

[1] Institute of Microelectronics,Chinese Academy of Sciences

来源：

Instrumentation | 2017年 / 4卷 / 03期

基金：

中国国家自然科学基金;

关键词：

MEMS Gyroscope; Interface Circuit; Driving Loop; PLL; TIA;

D O I：

10.15878/j.cnki.instrumentation.2017.03.002

中图分类号：

TH824.3 [];

学科分类号：

摘要：

A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.

引用

页码：7 / 13

页数：7

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