Design and testing of micro-tribometer with macro applied load

被引：0

作者：

XU HongYi ^{[1
]}

ZHANG ChenHui ^{[1
,2
]}

WU Pu ^{[1
]}

机构：

[1] State Key Laboratory of Tribology, Tsinghua University

[2] Shenzhen Key Laboratory of Micro-nano Manufacturing, Research Institute of Tsinghua University in Shenzhen

来源：

Science China(Technological Sciences) | 2016年 / 11期

关键词：

friction test methods; dual-frequency laser interferometer; bender piezo actuator;

D O I：

暂无

中图分类号：

TH87 [材料试验机与试验仪器];

学科分类号：

摘要：

With the development of superlubricity, the requirement for the accuracy of measuring super low friction force becomes more and more high. In this study, a novel micro-tribometer has been designed. The resolution and accuracy of friction force are 0.01 m N by using the dual frequency laser interferometer. Experiments were performed to investigate the ability of measuring friction force from different aspects. The interference signal mixed in the measured friction force curve was analyzed and can be removed by a designed filter. The results of experiment show that the tribometer is capable of measuring a super low friction force in the order of magnitude of 0.01 m N with an applied load up to 1 N.

引用

页码：1666 / 1672

页数：7

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