GaN-based p–i–n ultraviolet photodetectors with a thin p-type GaN layer on patterned sapphire substrates

被引:2
|
作者
黄红娟 [1 ]
闫大为 [1 ]
王国胜 [2 ]
谢峰 [2 ]
杨国锋 [1 ]
肖少庆 [1 ]
顾晓峰 [1 ]
机构
[1] Key Laboratory of Advanced Process Control for Light Industry (Ministry of Education), Department of Electronic Engineering, Jiangnan University
[2] The 38th Research Institute of China Electronics Technology Group Corporation
基金
中国博士后科学基金; 中央高校基本科研业务费专项资金资助;
关键词
GaN-based p; PD; n ultraviolet photodetectors with a thin p-type GaN layer on patterned sapphire substrates; type;
D O I
暂无
中图分类号
TN23 [紫外技术及仪器];
学科分类号
0803 ; 080401 ; 080901 ;
摘要
We study the performance of GaN-based p–i–n ultraviolet(UV) photodetectors(PDs) with a 60 nm thin ptype contact layer grown on patterned sapphire substrate(PSS). The PDs on PSS exhibit a low dark current of;pA under a bias of-5 V, a large UV/visible rejection ratio of;×103, and a high-quantum efficiency of;0% at 365 nm under zero bias. The average quantum efficiency of the PDs still remains above 20% in the deep-UV region from 280 to 360 nm. In addition, the noise characteristics of the PDs are also discussed, and the corresponding specific detectivities limited by the thermal noise and the low-frequency 1/f noise are calculated.
引用
收藏
页码:70 / 73
页数:4
相关论文
共 50 条
  • [1] GaN-based p-i-n ultraviolet photodetectors with a thin p-type GaN layer on patterned sapphire substrates
    Huang, Hongjuan
    Yan, Dawei
    Wang, Guosheng
    Xie, Feng
    Yang, Guofeng
    Xiao, Shaoqing
    Gu, Xiaofeng
    [J]. CHINESE OPTICS LETTERS, 2014, 12 (09)
  • [2] High Quantum Efficiency GaN-Based p-i-n Ultraviolet Photodetectors Prepared on Patterned Sapphire Substrates
    Wang, Guosheng
    Lu, Hai
    Chen, Dunjun
    Ren, Fangfang
    Zhang, Rong
    Zheng, Youdou
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 25 (07) : 652 - 654
  • [3] Effect of p-GaN layer doping on the photoresponse of GaN-based p-i-n ultraviolet photodetectors
    Wang, Jun
    Guo, Jin
    Xie, Feng
    Wang, Wanjun
    Wang, Guosheng
    Wu, Haoran
    Wang, Tanglin
    Song, Man
    [J]. 2015 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTICAL SENSORS AND APPLICATIONS, 2015, 9620
  • [4] GaN-Based MSM Photodetectors Prepared on Patterned Sapphire Substrates
    Chang, Shoou-Jinn
    Jhou, Y. D.
    Lin, Y. C.
    Wu, S. L.
    Chen, C. H.
    Wen, T. C.
    Wu, L. W.
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2008, 20 (21-24) : 1866 - 1868
  • [5] GaN-based Schottky barrier ultraviolet photodetectors with graded doping on patterned sapphire substrates
    Mou, Wenjie
    Zhao, Linna
    Chen, Leilei
    Yan, Dawei
    Ma, Huarong
    Yang, Guofeng
    Gu, Xiaofeng
    [J]. SOLID-STATE ELECTRONICS, 2017, 133 : 78 - 82
  • [6] GaN and AlGaN(p)/GaN p-i-n ultraviolet photodetectors
    Xu, G
    Salvador, A
    Bothckarev, A
    Kim, W
    Fan, Z
    Tang, H
    Morkoc, H
    Smith, G
    Estes, M
    Goldenberg, B
    Yang, W
    Krishnankutty, S
    [J]. 55TH ANNUAL DEVICE RESEARCH CONFERENCE, DIGEST - 1997, 1997, : 112 - 113
  • [7] GaN p-i-n ultraviolet photodetectors grown on homogenous GaN bulk substrates
    Li, Jinxiao
    Gao, Jian
    Yan, Xiaohong
    Li, Weiran
    Xu, Jian
    Wang, Qun
    Ou, Bingxian
    Yan, Dawei
    [J]. SOLID-STATE ELECTRONICS, 2022, 197
  • [8] Research for Patterned Sapphire Substrates of GaN-based LEDs
    Li Cheng-Cheng
    Xu Zhi-Mou
    Sun Tang-You
    Wang Zhi-Hao
    Wang Shuang-Bao
    Zhang Xue-Ming
    Peng Jing
    [J]. JOURNAL OF INORGANIC MATERIALS, 2013, 28 (08) : 869 - 874
  • [9] Influence of residual carbon impurities in i-GaN layer on the performance of GaN-based p-i-n photodetectors
    Li, Xiaojing
    Zhao, Degang
    Jiang, Desheng
    Chen, Ping
    Zhu, Jianjun
    Liu, Zongshun
    Le, Lingcong
    Yang, Jing
    He, Xiaoguang
    Zhang, Liqun
    Zhang, Shuming
    Liu, Jianping
    Yang, Hui
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2016, 34 (01):
  • [10] High Deep-Ultraviolet Quantum Efficiency GaN P-I-N Photodetectors with Thin P-GaN Contact Layer
    Lian Hai-Feng
    Wang Guo-Sheng
    Lu Hai
    Ren Fang-Fang
    Chen Dun-Jun
    Zhang Rong
    Zheng You-Dou
    [J]. CHINESE PHYSICS LETTERS, 2013, 30 (01)