A method for calibrating the confocal volume of a confocal three-dimensional micro-x-ray fluorescence setup

被引：0
|
作者：
周鹏 [1 ,2 ,3 ]
马欣然 [4 ]
张爽 [1 ,2 ,3 ]
孙天希 [1 ,2 ,3 ]
刘志国 [1 ,2 ,3 ]
机构：
[1] College of Nuclear Science and Technology Beijing Normal University
[2] Applied Optics Beijing Key Laboratory Department of Physics Beijing Normal University
[3] Beijing Radiation Center
[4] Department of Physics Beijing Normal University
来源：
Chinese Physics B | 2020年 / 29卷 / 02期
基金：
中国国家自然科学基金;
关键词：
three-dimensional micro-x-ray fluorescence(3D-XRF); depth analysis; confocal volume; probe calibrating;
D O I：
暂无
中图分类号：
O434.1 [X射线];
学科分类号：
070207 ; 0803 ;
摘要：
The measurement of the confocal volume of a confocal three-dimensional micro-x-ray fluorescence(3 D-XRF) setup is a key step in the field of confocal 3 D-XRF analysis.With the development of x-ray facilities and optical devices,3 D-XRF analysis with a micro confocal volume will create a great potential for 2 D and 3 D microstructural analysis and accurate quantitative analysis.However,the classic measurement method of scanning metal foils of a certain thickness leads to inaccuracy.A method for calibrating the confocal volume is proposed in this paper.The new method is based on the basic content of the textbook,and the theoretical results and the feasibility are given in detail for the 3 D-XRF mono-chromatic x-ray condition and the poly-chromatic x-ray condition.We obtain a set of experimental confirmation using the polychromatic x-ray tube in the laboratory.It is proved that the sensitivity factor of the 3 D-XRF can be directly and accurately obtained in a real calibration process.
引用
收藏
页码：222 / 227
页数：6
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