A New Atmospheric Pressure Microwave Plasma Source (APMPS)

被引：0
|
作者：
刘亮 [1 ]
张贵新 [1 ]
李银安 [2 ]
朱志杰 [1 ]
王新新 [1 ]
罗承沐 [1 ]
机构：
[1] Department of Electrical Engineering and Applied Electronic Technology, Tsinghua University, Beijing 100084, China
[2] Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
来源：
Plasma Science and Technology | 2008年 / 01期
基金：
中国国家自然科学基金;
关键词：
microwave plasma; atmospheric pressure microwave plasma;
D O I：
暂无
中图分类号：
O53 [等离子体物理学];
学科分类号：
070204 ;
摘要：
An atmospheric pressure microwave plasma source (APMPS) that can generate alarge volume of plasma at an atmospheric pressure has been developed at Tsinghna University.This paper presents the design of this APMPS,the theoretical consideration of microwave plasmaignition and the simulation results,including the distributions of the electric field and powerdensity inside the cavity as well as the accuracy of the sinmlation results.In addition,a methodof producing an atmospheric pressure microwave plasma and some relevant observations of theplasma are also provided.It is expected that this research would be useful for further developingatmospheric pressure microwave plasma sources and expanding the scope of their applications.
引用
收藏
页码：83 / 88
页数：6
相关论文
共 50 条
  • [21] Microwave Plasma Torch at Atmospheric Pressure
    Schulz, Andreas
    Leins, Martina
    Kopecki, Jochen
    Walker, Matthias
    Stroth, Ulrich
    [J]. VAKUUM IN FORSCHUNG UND PRAXIS, 2011, 23 (06) : 6 - 11
  • [22] A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
    Nowakowska, Helena
    Czylkowski, Dariusz
    Hrycak, Bartosz
    Jasinski, Mariusz
    [J]. MATERIALS, 2021, 14 (23)
  • [23] Microwave-based characterization of an atmospheric pressure microwave-driven plasma source for surface treatment
    Rackow, K.
    Ehlbeck, J.
    Krohmann, U.
    Baeva, M.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (03):
  • [24] Design of a Microwave Microplasma Source at Atmospheric Pressure
    Gregorio, Jose
    Leroy, Olivier
    Leprince, Philippe
    Alves, Luis L.
    Boisse-Laporte, Caroline
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2009, 37 (06) : 797 - 808
  • [25] A microwave plasma source for VUV atmospheric photochemistry
    Tigrine, S.
    Carrasco, N.
    Vettier, L.
    Cernogora, G.
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2016, 49 (39)
  • [26] Application of atmospheric pressure microwave plasma source for production of hydrogen via methane reforming
    Jasinski, M.
    Dors, M.
    Mizeraczyk, J.
    [J]. EUROPEAN PHYSICAL JOURNAL D, 2009, 54 (02): : 179 - 183
  • [27] Designing an efficient microwave-plasma source, independent of operating conditions, at atmospheric pressure
    Fleisch, T.
    Kabouzi, Y.
    Moisan, M.
    Pollak, J.
    Castanos-Martinez, E.
    Nowakowska, H.
    Zakrzewski, Z.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2007, 16 (01): : 173 - 182
  • [28] Application of atmospheric pressure microwave plasma source for production of hydrogen via methane reforming
    M. Jasiński
    M. Dors
    J. Mizeraczyk
    [J]. The European Physical Journal D, 2009, 54 : 179 - 183
  • [29] A new type of non-thermal atmospheric pressure plasma source
    Tikhonov, V. N.
    Ivanov, I. A.
    Tikhonov, A. V.
    [J]. 14TH INTERNATIONAL CONFERENCE GAS DISCHARGE PLASMAS AND THEIR APPLICATIONS, 2019, 1393
  • [30] Characteristics of Microwave Plasma Torch at Atmospheric Pressure
    Zhang, Qing
    Zhang, Guixin
    Wang, Shumin
    Wang, Liming
    Huo, Na
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 2010, 38 (11) : 3197 - 3200
12345