Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films

Nitrogen doped diamond-like carbon （DLC:N） films were prepared by electron cyclotron resonance chemical vapor deposition （ECR-CVD） on polycrystalline Si chips.Film thickness is about 50 nm.Auger electron spectroscopy （AES） was used to evaluate nitrogen content,and increasing N;flow improved N content from 0 to 7.6%.Raman and X-ray photoelectron spectroscopy （XPS） analysis results reveal N-sp;C and N-sp;C structure.With increasing the N;flow,sp;C decreases from 73.74% down to 42.66%,and so does N-sp;C from 68.04% down to 20.23%.The hardness decreases from 29.18 GPa down to 19.74 GPa,and the Young’s modulus from 193.03 GPa down to 144.52 GPa.