NEW PRECISION PIEZOELECTRIC STEP ACTUATOR

被引：2
|
作者：
LIU Jianfang YANG Zhigang FAN Zunqiang CHENG Guangming College of Mechanical Engineering
机构：
来源：
Chinese Journal of Mechanical Engineering | 2006年 / 02期
关键词：
Piezoelectric step actuator Stator outside anchoring/loosen Precision Double-side thin flexible hinge Large travel;
D O I：
暂无
中图分类号：
TN384 [铁电及压电器件];
学科分类号：
0805 ; 080501 ; 080502 ; 080903 ;
摘要：
A new precision piezoelectric actuator is proposed to improve its drive capabilities. The actuator is based on the piezoelectric technology. It adopts the principle of bionics and works with a new method of stator initiative anchoring/loosen and a distortion structure of double-side thin flexible hinge. It solves the problem of anchoring/loosen, frequency, journey, resolution and velocity. The experiment shows that the new linear piezoelectric actuator works with high frequency (100 Hz), high speed (502 μm/s), large travel (>10 mm), high resolution (0.05 urn) and high load (100 N). This kind of new piezoelectric actuator will be applied for large travel and high resolution driving device, optics engineering, precision positioning and some micromanipulation field.
引用
收藏
页码：212 / 216
页数：5
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