Influence of surface states on deep level transient spectroscopy in AlGaN/GaN heterostructure

Deep level transient spectroscopy（DLTS） as a method to investigate deep traps in AlGaN/GaN heterostructure or high electron mobility transistors（HEMTs） has been widely utilized.The DLTS measurements under different bias conditions are carried out in this paper.Two hole-like traps with active energies of E;+ 0.47 eV,and E;+ 0.10 eV are observed,which are related to surface states.The electron traps with active energies of E;-0.56 eV are located in the channel,those with E;-0.33 eV and E;-0.88 eV are located in the AlGaN layer.The presence of surface states has a strong influence on the detection of electron traps,especially when the electron traps are low in density.The DLTS signal peak height of the electron trap is reduced and even disappears due to the presence of plentiful surface state.