Characterization and Application of Diamond-like Carbon Films

被引:0
|
作者
侯清润
高炬
杨晔
迟宁
机构
关键词
Diamond like carbon films; TEM; AFM; porous silicon; Photoluminescence;
D O I
暂无
中图分类号
O613.71 [碳C];
学科分类号
070301 ; 081704 ;
摘要
1IntroductionPulsedlaserdeposited(PLD)diamondlikecarbon(DLC)filmsareveryhardduetothehighenergyionicspeciesintheplumeproduc...
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页码:48 / 53
页数:6
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