Love wave acoustic sensor as a multisensing device in liquids

被引：0

作者：

Tamarin, Ollivier ^{[1
,2
]}

Choudhari, Asawari ^{[1
,2
]}

Rube, Maxence ^{[1
]}

Sebeloue, Martine ^{[1
]}

Sadli, Idris ^{[1
]}

Rebiere, Dominique ^{[2
]}

Dejous, Corinne ^{[2
]}

机构：

[1] Univ Guyane, UMR 228, Espace Dev, F-97300 Cayenne, France

[2] Univ Bordeaux, CNRS, Bordeaux INP, IMS,UMR 5218, F-33400 Talence, France

来源：

2024 38TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES, SBMICRO 2024 | 2024年

关键词：

Love wave sensor; liquid sample; electrical parameters; readout electronic circuit; real time detection;

D O I：

10.1109/SBMicro64348.2024.10673860

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a new measurement approach with Love wave sensor delay line. We demonstrate that by positioning a liquid on the entire surface of sensor, based on the piezoelectricity of the substrate, it is possible to distinguish mechanical parameters as well as electrical parameters of liquid sample. This method called "multiphysic approach" is possible in situ thanks to recent open loop readout electronic circuit and onboard micro controller.

引用

页数：4

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