Dynamic range extension method for sinusoidal phase modulating interferometer based on in-phase component signal reconstruction

被引:0
|
作者
Zhang, Qiyuan [1 ,2 ]
Zhang, Lieshan [3 ]
Xing, Zhaoqiang [3 ]
Fang, Wenjun [3 ]
Xia, Dunzhu [1 ,2 ]
机构
[1] Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Peoples R China
[2] Southeast Univ, Key Lab Microinertial Instrument & Adv Nav Technol, Minist Educ, Nanjing 210096, Peoples R China
[3] Zhejiang Sci Tech Univ, Sch Informat Sci & Engn, Hangzhou, Peoples R China
关键词
laser interferometer; phase generated carrier(PGC) demodulation; spectrum aliasing; in-phase component signal reconstruction(ICR); dynamic range extension; PGC DEMODULATION SCHEME; ALGORITHM; CARRIER; DEPTH; COMPENSATION; DELAY; DCM;
D O I
10.1088/1361-6501/ad8945
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The continuous increase of the amplitude of the measured vibration will cause spectrum aliasing in the interference signal of the sinusoidal phase modulating interferometer (SPMI), thereby constraining its measurement dynamic range (DR). To address this issue, a DR extension method of SPMI based on the reconstruction of in-phase component signal is proposed. On the basis of conventional SPMI, an additional reference signal is introduced for estimating the phase modulation depth (PMD) and the major to minor axis ratio R-e of the Lissajous ellipse formed by orthogonal interference signal pair and a phase demodulation algorithm named as phase generated carrier (PGC)- in-phase component signal reconstruction (ICR)- differential-and-cross-multiplying algorithm (DCM) which integrates PGC-DCM algorithm and the ICR is proposed. Initially, the PMD is regulated to approximately 1.8412 rad, ensuring that the quadrature component signal can be accurately extracted from the mixed signal of the interference and carrier signals, even in the presence of spectrum aliasing in the original interference signal. Then, the undistorted quadrature component signal is used to reconstruct an in-phase component signal with the estimated value of R-e. Finally, the reconstructed in-phase component signal and quadrature component signal are normalized, and a DCM approach is applied to obtain the measured vibration. A SPMI measurement system based on Michelson interferometer structure is constructed to experimentally validate the proposed method. The experimental results demonstrate that the proposed method can effectively extend the DR of the SPMI system in the presence of spectrum aliasing. The DR of the system is increased from 97.52 dB @ 55 Hz to 102.6 dB @ 55 Hz, with the maximum measurable amplitude increasing from 7728.75 nm @ 55 Hz to 13 705.16 nm @ 55 Hz.
引用
收藏
页数:16
相关论文
共 50 条
  • [41] Displacement sensor by a sinusoidal phase-modulating laser diode interferometer using optical fibers
    Sasaki, O
    Arakawa, Y
    Suzuki, T
    2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, : 1014 - 1015
  • [42] Sinusoidal phase-modulating fiber-optic interferometer fringe with a feedback control system
    Lv, Changrong
    Duan, Fajie
    Bo, En
    Duan, Xiaojie
    Feng, Fan
    Fu, Xiao
    APPLIED OPTICS, 2014, 53 (27) : 6206 - 6211
  • [43] Sinusoidal phase-modulating laser diode interferometer insensitive to the intensity modulation of the light source
    Li, Zhongliang
    Wang, Xiangzhao
    Bu, Peng
    Huang, Bingjie
    Zheng, Defeng
    OPTIK, 2009, 120 (16): : 799 - 803
  • [44] Dynamic range of Ronchi test with a phase-shifted sinusoidal grating
    Hibino, K
    Farrant, DI
    Ward, BK
    Oreb, BF
    APPLIED OPTICS, 1997, 36 (25) : 6178 - 6189
  • [45] Direct phase modulating laser diode interferometer for in-process measurement using sinusoidal signal synchronized with the CCD camera's exposure time
    Zhao, XF
    Suzuki, T
    Masutomi, T
    Sasaki, O
    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING II, 2005, 5633 : 272 - 279
  • [46] Demodulation for sinusoidal frequency/phase modulation interferometer using artificial harmonic series signal and phase-locked loop
    Aketagawa, Masato
    Higuchi, Masato
    Wei, Dong
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XI, 2019, 11056
  • [47] Profilometry using Fizeau-interferometer based on optical comb interferometry and sinusoidal phase modulation method
    Choi, Samuel
    Miyatsuka, Hidetaka
    Sasaki, Osami
    Suzuki, Takamasa
    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS, 2010, 7855
  • [48] Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement
    何国田
    王向朝
    曾爱军
    唐锋
    Chinese Optics Letters, 2007, (03) : 164 - 167
  • [49] Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer
    He Guotian
    Liao Changrong
    Jiang Helun
    Yuangang Lu
    Huang Shanglian
    OPTIK, 2009, 120 (11): : 553 - 557
  • [50] Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer
    Suzuki, Takamasa
    Maki, Toshiyuki
    Zhao, Xuefeng
    Sasaki, Osami
    Applied Optics, 2002, 41 (10): : 1949 - 1953