[1] Changwon Natl Univ, Dept Mat Convergence & Syst Engn, Chang Won 51140, South Korea
[2] Korea Inst Ceram Engn & Technol, Semicond Mat Ctr, Jinju 52851, South Korea
[3] Hanoi Univ Sci & Technol, Sch Mech, Hanoi 100000, Vietnam
[4] Thai Binh Univ, Fac Technol & Engn, Thai Binh 06000, Vietnam
[5] Phenikaa Univ, Fac Mech Engn & Mechatron, Hanoi 100000, Vietnam