Third order lateral grating distributed feedback quantum cascade laser emitting around 4.7 μm

被引:0
|
作者
Li, Hongxiao [1 ,2 ]
Liu, Zizhuo [1 ]
Zhuo, Ning [3 ]
Sun, Yongqiang [3 ]
Gong, Min [1 ,2 ]
Chen, Anlan [1 ,2 ]
Yao, Jinlin [3 ]
Lin, Zhongxi [1 ]
Liang, Ping [3 ]
Zhong, Xingli [1 ]
Su, Hui [1 ]
Zhang, Jinchuan [3 ]
Liu, Fengqi [3 ]
机构
[1] Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Fujian, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
关键词
quantum cascade laser; semiconductor laser; mid-infrared; lateral grating; HIGH-PERFORMANCE; HIGH-POWER; DISSIPATION; WAVE;
D O I
10.1088/1361-6463/ad9501
中图分类号
O59 [应用物理学];
学科分类号
摘要
Lateral grating is an effective and concise method for realizing single-mode laser sources, and it exhibits significant research value due to its regrowth-free characteristic and ideal wavelength reliability. In this study, by combining a third-order lateral grating design with an advanced fabrication process, we demonstrate a lateral grating distributed feedback (DFB) quantum cascade laser (QCL) emitting around 4.7 mu m with ideal single-mode performance and emission wavelength stability. A single-longitudinal-mode output power of 13 mW is achieved, with a side mode suppression ratio of 20 dB, and the wavelength shift ratio is as low as 0.04 nm mA(-1), indicating exceptional wavelength stability. Benefiting from the improvements in high-order lateral grating design and the high-quality deep etching grating production, this research on lateral grating DFB QCLs simplifies the manufacturing process and controls the cost of mid-infrared light sources. This is of great significance for promoting the commercialization of mid-infrared QCLs.
引用
收藏
页数:7
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