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- [21] Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films Journal of Electroceramics, 2004, 12 : 101 - 108
- [22] BROADBAND PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS BASED ON DUAL RESONANCE MODES 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015, : 146 - 149
- [26] HIGH PRESSURE OUTPUT 40 kHz AIR COUPLED PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS 2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2019, : 787 - 790
- [28] Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements 2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2019, : 2489 - 2492