A MEMS Pirani Vacuum Gauge Based on Porous Silicon

被引：0
|
作者：
Lin, Yuzhe [1 ]
Zhang, Zichao [1 ]
Tao, Jifang [1 ,2 ]
Wen, Lianggong [3 ]
机构：
[1] Shandong Univ, Sch Informat Sci & Engn, Qingdao 266237, Peoples R China
[2] Shandong Univ, Shenzhen Res Inst, Shenzhen 518063, Peoples R China
[3] Beihang Univ, Shenzhen Inst, Shenzhen 518057, Peoples R China
来源：
MICROMACHINES | 2025年 / 16卷 / 03期
关键词：
Micro-Electro-Mechanical System; Pirani vacuum gauge; porous silicon; MEMS vacuum gauge; PRESSURE SENSOR;
D O I：
10.3390/mi16030296
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Vacuum gauges based on Micro-Electro-Mechanical System (MEMS) technology have the advantages of small size, high reliability, and low cost, so they are widely used in semiconductor, chemical, laboratory, and aerospace. In this paper, a high-reliability MEMS Pirani vacuum gauge based on a porous silicon platform is designed, fabricated, and characterized. The repeatability within 4 similar to 10(5) Pa has been tested. The porous silicon acting as a support material achieved a porosity of 68% and a thermal conductivity of 3.5 W/(m center dot K), and the surface morphology of the porous silicon is smooth. The proposed MEMS Pirani vacuum gauge containing no suspended thin-film structures has good mechanical stability and is unaffected by mechanical shock and vibration in operation.
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页数：10
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