Two-Photon 3D-Printed Fabry-Perot Interferometric Sensor for Ultrasensitive High-Frequency Ultrasonic Detection

被引：0

作者：

Wen, Jialin ^{[1
,2
]}

Yang, Tianyu ^{[2
]}

Zheng, Zeyu ^{[1
,2
]}

Xi, Tingwei ^{[2
]}

Liu, Zihan ^{[2
]}

Wei, Heming ^{[3
]}

Lan, Linfeng ^{[1
]}

Deng, Weifeng ^{[4
]}

Liu, Huanhuan ^{[2
]}

Yang, Chunlei ^{[2
]}

Dong, Yuming ^{[2
]}

机构：

[1] South China Univ Technol, Guangdong Basic Res Ctr Excellence Energy & Inform, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Peoples R China

[2] Chinese Acad Sci, Shenzhen Inst Adv Technol, Res Ctr Optoelect Engn & Technol, Shenzhen 518055, Peoples R China

[3] Shanghai Univ, Key Lab Specialty Fiber Opt & Opt Access Networks, Joint Int Res Lab Specialty Fiber Opt & Adv Commun, Shanghai 200444, Peoples R China

[4] Shenzhen SDG Informat Co Ltd, Shenzhen 518057, Peoples R China

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2025年 / 43卷 / 02期

基金：

中国国家自然科学基金;

关键词：

Sensitivity; Acoustics; Vibrations; Sensors; Optical fiber sensors; Damping; Structural beams; EFPI; fiber optic sensor; partial discharge; two-photon polymerization; ultrasonic sensor; ACOUSTIC PRESSURE SENSOR; PARTIAL DISCHARGES; DIAPHRAGM; SENSITIVITY; CAVITY;

D O I：

10.1109/JLT.2024.3454224

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel fiber extrinsic Fabry-P & eacute;rot interferometric ultrasonic sensor for detecting high-frequency ultrasonic signals is proposed and fabricated. The diaphragm structure features an anti-outer-ring clover design. Finite element simulation is employed to determine optimal parameters before directly printing the sensor onto the fiber tip using two-photon 3D printing technique. Experimental results indicate that the sensor achieves a signal-to-noise ratio of 67 dB@300 kHz, a mechanical sensitivity of 1362 nm/kPa, and a noise equivalent acoustic signal level of 3.98 mu Pa/Hz(1/2) @300 kHz. The proposed fiber sensor offers a new approach for sensing weak ultrasonic signals and is expected to be applied in various ultrasonic detection fields.

引用

页码：948 / 956

页数：9

共 42 条

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