Evaluation of the impact of body bias on the threshold voltage drift of planar SiO2 transistors

被引:0
|
作者
Waltl, Michael [1 ]
Tselios, Konstantinos [1 ]
Knobloch, Theresia [2 ]
Waldhoer, Dominic [2 ]
Enichlmair, Hubert [3 ]
Ioannidis, Eleftherios G. [3 ]
Minixhofer, Rainer [3 ]
Grasser, Tibor [2 ]
机构
[1] TU Wien, Inst Microelect, Christian Doppler Lab Single Defect Spect Semicond, Vienna, Austria
[2] TU Wien, Inst Microelect, Vienna, Austria
[3] Ams OSRAM AG, Tobelbader Str 30, A-8141 Premstatten, Austria
关键词
Charge trapping; CMOS; Analog circuits; Variability; Reliability; Body bias; BTI; RANDOM TELEGRAPH SIGNAL; TRAPS; TEMPERATURE; MOSFETS;
D O I
10.1016/j.microrel.2025.115693
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The performance of semiconductor transistors is significantly influenced by charge trapping at oxide and interface defects. The impact of charge-trapping events of defects on the characteristics of the transistor is strongly dependent on factors such as the geometry and the operating point at which the transistor is used. Understanding the complex relationships between the influence of defects and the robustness of devices is essential to optimize circuit performance and becomes particularly important in analog designs. In this work, we investigate the influence of gate oxide defects on the reliability of nanoscale MOS transistors under varying body bias conditions. Using measure-stress-measure techniques, we observe notable effects on both time-zero and time-dependent variability with the application of body bias. Furthermore, the amplitudes of the step heights are investigated as they provide an important measure in scaled technologies to estimate the impact of traps on the device behavior. The results indicate that a body bias can be strategically employed to enhance device reliability by fine-tuning the body bias conditions.
引用
收藏
页数:6
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