Experimental Investigation on the Electrical Properties of a-InGaZnO Thin-Film Transistors Under Total Dose Ionizing Radiation

被引:0
|
作者
Yang, Guangan [1 ]
Huang, Geng [1 ]
Zhu, Hong [1 ]
Wu, Haotian [2 ]
Li, Tianzhen [1 ]
Huang, Tingrui [3 ,4 ]
Yu, Zuoxu [3 ,4 ]
Xu, Yong [1 ]
Sun, Weifeng [3 ,4 ]
Wu, Wangran [3 ,4 ]
Bi, Jinshun [2 ]
机构
[1] Nanjing Univ Posts & Telecommun, Coll Integrated Circuit Sci & Engn, Nanjing 210023, Peoples R China
[2] Guizhou Normal Univ, Sch Integrated Circuits, Guiyang 550025, Peoples R China
[3] Southeast Univ, Sch Integrated Circuits, Nanjing 210096, Peoples R China
[4] Southeast Univ, Natl ASIC Syst Engn Res Ctr, Nanjing 210096, Peoples R China
基金
中国国家自然科学基金;
关键词
Amorphous indium-gallium-zinc-oxide (a-IGZO); thin-film transistors (TFTs); radiation; total ionizing dose (TID); low-temperature annealing; IGZO;
D O I
10.1109/LED.2025.3531357
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work conducts an experimental study on the effects of total-ionizing-dose (TID) on amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors. The threshold voltage (V-th) exhibited a negative shift during irradiation, concomitant with a decline in carrier mobility (mu(FE)) and an increase in off-current. The TID-induced H-related traps in the a-IGZO layer not only increase the free carriers but also passivate the oxygen vacancies, leading to a reduction in mu(FE) and on/off characteristics, as evidenced by the X-ray Photoelectron Spectroscopy (XPS) analysis. The irradiation damages on the a-IGZO TFTs were effectively mitigated and recovered through low-temperature (200 degrees C) annealing, as confirmed by low-frequency noise (LFN) analysis. This approach offers a viable strategy for the radiation hardening of a-IGZO TFTs aiming at space applications.
引用
收藏
页码:440 / 443
页数:4
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