A comprehensive evaluation of accuracy and performance metrics for a laser on-the-fly processing control system

Laser On-the-Fly processing technology integrates a motion platform and a laser galvanometer scanning system to achieve high-speed and high-precision dynamic on-the-fly processing. In this study, a UV pulsed laser On-theFly processing system was developed, and laser processing monitoring technology was introduced to realize realtime optimization of processing parameters through a synchronous multi-axis motion control system. Experimental results demonstrate that the system maintains a circularity error within 1 mu m and an average error within 0.1 mu m during a 10 mu m diameter circular scan. Furthermore, the system achieves scanning speeds exceeding 3000 mm/s while maintaining a pattern distortion ratio of less than 1 %. This system is suitable for both singleaxis and dual-axis processing of large-area planar substrates and maintains a stable laser spot with a highly uniform distribution during scanning, thereby effectively improving processing efficiency. The results of this study can provide a potential solution for future microfabrication industries.