Effects of Black Silicon Surface Morphology Induced by a Femtosecond Laser on Absorptance and Photoelectric Response Efficiency

被引:0
|
作者
Zhang, Xiaomo [1 ,2 ]
Li, Weinan [1 ,2 ]
Jin, Chuan [1 ,2 ]
Cao, Yi [1 ,2 ]
Liu, Feng [3 ,4 ]
Wei, Na [1 ,2 ]
Wang, Bo [1 ,2 ]
Zhou, Rundong [1 ,2 ]
Zhu, Xiangping [1 ,2 ,5 ]
Zhao, Wei [1 ,2 ]
机构
[1] Xian Inst Opt & Precis Ind Dev Zone, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
[2] Univ Chinese Acad Sci, 19 Yuquan Rd, Beijing 100049, Peoples R China
[3] Northwestern Polytech Univ, Sch Phys Sci & Technol, Minist Ind & Informat Technol, Xian 710129, Peoples R China
[4] Northwestern Polytech Univ, Sch Phys Sci & Technol, Shaanxi Key Lab Opt Informat Technol, Xian 710129, Peoples R China
[5] Key & Core Technol Innovat Inst Greater Bay Area, Bldg B3,11 Kaiyuan Ave, Guangzhou 510535, Peoples R China
基金
中国国家自然科学基金;
关键词
black silicon; femtosecond laser ablation; photodetector; parameter optimization; MICROSTRUCTURED SILICON; PHOTODETECTORS; ENHANCEMENT; GERMANIUM;
D O I
10.3390/photonics11100947
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this study, the effects of variations in the height (h) and bottom radius (r) of black silicon microstructures on their absorptance and photoelectric response efficiency were analyzed. By using the relation cot theta/2=hr to combine the parameters, it was found that changes in morphology affected the absorptance of black silicon microstructures, with h being directly proportional to the absorptance, while r was inversely proportional. A positive correlation was observed between cot theta/2 and absorptance. However, the correlation between cot theta/2 and photoelectric response efficiency was not significant. Through Raman spectroscopy analysis of the samples, it was concluded that as the laser ablation energy density increased, more lattice defects were introduced, weakening the charge carrier transport efficiency. This study further elucidated the mechanism by which microstructural changes impacted the absorptance and energy density of black silicon, providing valuable insights for optimizing its energy density.
引用
收藏
页数:16
相关论文
共 50 条
  • [41] Femtosecond laser fabricating black silicon in alkaline solution
    Jiao Meng
    Haiying Song
    Xiaoli Li
    Shibing Liu
    Applied Physics A, 2015, 118 : 1197 - 1203
  • [42] Femtosecond laser fabricating black silicon in alkaline solution
    Meng, Jiao
    Song, Haiying
    Li, Xiaoli
    Liu, Shibing
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2015, 118 (04): : 1197 - 1203
  • [43] Femtosecond Laser-Induced Nanometer-Scale Rods on Silicon Surface
    Deng, Guoliang
    Feng, Guoying
    Liu, Kui
    Zhou, Shouhuan
    INTEGRATED FERROELECTRICS, 2011, 127 : 199 - 204
  • [44] Difference in microstructures induced by femtosecond laser scanning on silicon surface at different temperatures
    Liu, Kui
    Feng, Guoying
    Deng, Guoliang
    Li, Wei
    Zhongguo Jiguang/Chinese Journal of Lasers, 2012, 39 (08):
  • [45] Femtosecond Pulsed Laser-induced Ablation Region Development on the Surface of Silicon
    Yuan, D-Q.
    Zhou, M.
    Ren, N-F.
    Xu, J-T.
    LASERS IN ENGINEERING, 2013, 25 (1-2) : 13 - 21
  • [46] Femtosecond laser induced silicon surface cone microstructures by covering transparent films
    Li Bao-Jia
    Zhou Ming
    Zhang Wei
    ACTA PHYSICA SINICA, 2012, 61 (23)
  • [47] Colorizing silicon surface with regular nanohole arrays induced by femtosecond laser pulses
    Zhang, Cheng-Yun
    Yao, Jian-Wu
    Liu, Hai-Ying
    Dai, Qiao-Feng
    Wu, Li-Jun
    Lan, Sheng
    Trofimov, Vyacheslav A.
    Lysak, Tatiana M.
    OPTICS LETTERS, 2012, 37 (06) : 1106 - 1108
  • [48] Nanostructuring of Silicon Surface with Femtosecond-Laser-Induced Near-field
    Miyaji, Godai
    Zhang, Kaifeng
    Fujita, Junya
    Miyazaki, Kenzo
    JOURNAL OF LASER MICRO NANOENGINEERING, 2012, 7 (02): : 198 - 201
  • [49] Antireflection effect of femtosecond laser-induced periodic surface structures on silicon
    Vorobyev, A. Y.
    Guo, Chunlei
    OPTICS EXPRESS, 2011, 19 (19): : A1031 - A1036
  • [50] Functional Performance of Silicon with Periodic Surface Structures Induced by Femtosecond Pulsed Laser
    Chen, Yong
    Peng, Weiping
    Hu, Xiaofeng
    Zhang, Chen
    COATINGS, 2022, 12 (06)