Active Vibration Isolation Platform with Distributed Feed-Forward Feedback Hybrid Control

被引：0
|
作者：
Anpeng Xu [1 ]
Shuai He [2 ]
Qi Huo [1 ]
Lintao Wang [1 ]
Ang Li [1 ]
Dawei Li [1 ]
Yang Chen [1 ]
Zhenbang Xu [1 ]
机构：
[1] Changchun Institute of Optics,Fine Mechanics and Physics
[2] Chinese Academy of Sciences,undefined
[3] University of Chinese Academy of Sciences,undefined
来源：
Journal of Vibration Engineering & Technologies | 2025年 / 13卷 / 2期
关键词：
Atomic Force Microscopy; Hybrid active and passive solution; Distributed suboptimal feedforward control; Scientific instrument research;
D O I：
10.1007/s42417-025-01756-2
中图分类号：
学科分类号：
摘要：
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