Active Vibration Isolation Platform with Distributed Feed-Forward Feedback Hybrid Control

被引:0
|
作者
Anpeng Xu [1 ]
Shuai He [2 ]
Qi Huo [1 ]
Lintao Wang [1 ]
Ang Li [1 ]
Dawei Li [1 ]
Yang Chen [1 ]
Zhenbang Xu [1 ]
机构
[1] Changchun Institute of Optics,Fine Mechanics and Physics
[2] Chinese Academy of Sciences,undefined
[3] University of Chinese Academy of Sciences,undefined
关键词
Atomic Force Microscopy; Hybrid active and passive solution; Distributed suboptimal feedforward control; Scientific instrument research;
D O I
10.1007/s42417-025-01756-2
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学科分类号
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