Compact Si-SiN photonic fiber optic gyroscope transceiver for large volume manufacturing

被引:0
|
作者
ZHIZHOU LU [1 ]
HONGMIN FU [1 ]
DAOXIN SUN [2 ,3 ]
HUACHENG LIU [1 ]
HONGCHEN JIAO [2 ,3 ]
SHIJIA FAN [1 ]
SHAN GAO [1 ]
TONGHUI LI [1 ]
LINGYU WANG [2 ,3 ]
LI JIN [1 ]
HENG ZHAO [1 ]
WENXUAN LIU [4 ]
JIAN LIU [4 ]
HAIPENG YU [4 ]
ZHUOHENG REN [4 ]
NAIDI CUI [1 ]
WENYUAN XU [4 ]
LISHUANG FENG [2 ,3 ]
JIN GUO [1 ]
JUNBO FENG [1 ]
机构
[1] Chongqing United Microelectronics Center (CUMEC)
[2] School of Instrumentation and Optoelectronic Engineering,Beihang University
[3] National Key Laboratory of Inertial Technology,Beihang University
[4] Chongqing Zixingzhe
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中图分类号
TH824.3 [];
学科分类号
摘要
<正>Miniaturized interferometric fiber optic gyroscopes (IFOGs) providing high-precision angular measurement are highly desired in various smart applications. In this work, we present a high-performance Si-SiN photonic FOG transceiver composed of an optical source, polarizer, splitter, and on-chip germanium (Ge) photodetector (PD).The transceiver is assembled in a standard butterfly package with a thermo-electric cooler (TEC).
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页码:2912 / 2918
页数:7
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