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- [29] Computational design of membrane pumps with active/passive valves for microfluidic MEMS DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 266 - 277
- [30] Patterning New Piezoelectric Thin Sheet Materials for Micro-Valves and Micro-Pumps ACTUATOR 08, CONFERENCE PROCEEDINGS, 2008, : 210 - +