Patterning of Fine Features on Material Surfaces Using a Ga Ion-Beam in a FIB-SEM

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作者：
Ghosh, Supriya [1 ]
Mkhoyan, K. Andre [1 ]
机构：
[1] Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis,MN,55455, United States
来源：
arXiv |
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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摘要：
Amorphization - Gallium alloys - Gallium phosphide - III-V semiconductors - Layered semiconductors - Silicon wafers
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