Thermal inverse design for resistive micro-heaters

被引：0

作者：

Dao, Khoi Phuong ^{[1
]}

Hu, Juejun ^{[1
]}

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2024年 / 136卷 / 22期

基金：

美国国家科学基金会;

关键词：

OPTIMIZATION;

D O I：

10.1063/5.0235526

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper proposes an inverse design scheme for resistive heaters. By adjusting the spatial distribution of a binary electrical resistivity map, the scheme enables objective-driven optimization of heaters to achieve pre-defined steady-state temperature profiles. The approach can be fully automated and is computationally efficient since it does not entail extensive iterative simulations of the entire heater structure. The design scheme offers a powerful solution for resistive heater device engineering in applications spanning electronics, photonics, and microelectromechanical systems.

引用

页数：9

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