Precision Three-Axis Positioning Stage in Compact Size Employing Miniature Actuators

被引：0
|
作者：
Shimizu Y.
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2022年 / 88卷 / 09期
关键词：
Cr-N strain-gauge sensor; displacement sensor; miniature actuator; precision positioning; stage system;
D O I：
10.2493/jjspe.88.668
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：668 / 672
页数：4
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