Design and Optimization of a Beam-Membrane−Three−Island Structure of MEMS Piezoresistive Pressure Sensor

被引：0
|
作者：
Guo, Wei [1 ]
Li, Hui [1 ]
Luo, Dengling [1 ]
Liu, Xihui [1 ]
Zou, Li [1 ]
Li, Shaorong [1 ]
Guo, Xiaowei [1 ,2 ]
Tang, Puying [1 ]
机构：
[1] School of Optical Science and Engineering, University of Electronic Science and Technology of China, Chengdu,610054, China
[2] Yangtze Delta Region Institute (Huzhou), University of Electronic Science and Technology of China, Huzhou,313001, China
来源：
Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China | 2024年 / 53卷 / 06期
关键词：
Compendex;
D O I：
10.12178/1001-0548.2023010
中图分类号：
学科分类号：
摘要：
Diaphragms
引用
收藏
页码：852 / 861
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