Investigating the Arc-Shaped Kink Drain Voltage of Drain Current With Capacitance-Voltage Measurement Method in GaN HEMTs

被引:0
|
作者
Hsu, Jui-Tse [1 ]
Hsu, Shawn S. H. [1 ]
Chang, Ting-Chang [2 ,3 ]
Lien, Chen-Hsin [1 ]
Kuo, Ting-Tzu [4 ]
Yeh, Chien-Hung [5 ]
Lin, Jia-Hong [6 ]
Lee, Ya-Huan [6 ]
Lin, Cheng-Hsien [6 ]
Hung, Wei-Chieh [6 ]
Huang, I-Yu [7 ]
机构
[1] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 30013, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[3] Natl Sun Yat Sen Univ, Coll Semicond & Adv Technol Res, Kaohsiung 804, Taiwan
[4] Natl Sun Yat Sen Univ, Dept Elect Engn, Kaohsiung 80424, Taiwan
[5] Natl Sun Yat sen Univ, Dept Photon, Kaohsiung 80424, Taiwan
[6] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 80424, Taiwan
[7] Natl Sun Yat Sen Univ, Coll Semicond & Adv Technol Res, Kaohsiung 80424, Taiwan
关键词
Stress; MODFETs; HEMTs; Logic gates; Degradation; Electrons; Electron traps; Capacitance-voltage characteristics; Gallium nitride; Voltage measurement; Gallium nitride (GaN); depletion mode; high electron mobility transistor (HEMT); kink effect; hot carrier stress;
D O I
10.1109/TDMR.2024.3467344
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study, the measure-stress-measure (MSM) technique under the arc-shaped kink drain voltage (V-D,V-kink) conditions is applied to investigate the V-D,V-kink in GaN high electron mobility transistors (HEMTs). Forward and reverse transfer curves indicate that the V-D,V-kink would change with gate voltages increasing. However, no previous study has investigated the exact location of traps that would dominate the loci of VD,kink. The results suggest that the trend of on-state current (Ion) degradation is caused by threshold voltage (Vt) shift. Hence, it can be determined that the V-D,V-kink is related to the degree of impact ionization, which is dominant by the holes generation in the buffer. In addition, the capacitance-voltage (C-V) measurements reveal that holes generated through impact ionization at the gate edge are responsible for the shift in VD,kink. This physical mechanism is further supported by temperature-dependent analysis. Finally, the results offer a novel C-V measurement to characterize and model the physical mechanisms of the kink effect, which is governed by hot carrier degradation in GaN HEMTs.
引用
收藏
页码:544 / 548
页数:5
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