Oxidation site of polycrystalline silicon surface studied using scanning force/tunneling microscope (AFM/STM) in air

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[1] Sugawara, Yasuhiro
[2] Fukano, Yoshinobu
[3] Nakano, Akihiko
[4] Ida, Tohru
[5] Morita, Seizo
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Sugawara, Yasuhiro | 1600年 / 31期
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Silicon and Alloys;
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