DIFFUSION COEFFICIENT AND SOLID SOLUBILITY OF ELECTRICALLY ACTIVE COBALT IN SILICON.

被引：0
|
作者：
Tomokage, Hajime
Kitagawa, Hajime
Hashimoto, Kimio
机构：
来源：
Memoirs of the Kyushu University, Faculty of Engineering | 1981年 / 41卷 / 01期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
SEMICONDUCTING SILICON
引用
收藏
页码：59 / 63
相关论文
共 50 条
  • [31] ELECTRICALLY ACTIVE, ION-IMPLANTED BORON AT THE SOLUBILITY LIMIT IN SILICON
    LIEFTING, JR
    SCHREUTELKAMP, RJ
    VANHELLEMONT, J
    VANDERVORST, W
    MAEX, K
    CUSTER, JS
    SARIS, FW
    APPLIED PHYSICS LETTERS, 1993, 63 (08) : 1134 - 1136
  • [32] CHANNELING STUDY ON RELAXATION CHARACTERISTICS OF SUPERSATURATED SOLID SOLUBILITY IN ARSENIC-IMPLANTED SILICON.
    Wang, Yusheng
    Yan, Jianhua
    Zheng, Shengnan
    Xu, Li
    Tsien, Peihsin
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 1985, 6 (02): : 173 - 180
  • [33] INFLUENCE OF COPPER ON THE DIFFUSION OF GOLD IN SILICON.
    Akhmedova, M.M.
    Berman, L.S.
    Lebedev, A.A.
    Soviet Physics, Semiconductors (English translation of Fizika i Tekhnika Poluprovodnikov), 1976, 10 (12): : 1399 - 1400
  • [34] DIFFUSION OF GOLD IN HEAVILY DOPED SILICON.
    Malkovich, R.Sh.
    Pokoeva, V.A.
    Soviet Physics, Solid State (English translation of Fizika Tverdogo Tela), 1976, 18 (09): : 1521 - 1523
  • [35] ANOMALOUS DIFFUSION IN PHOSPHORUS IMPLANTED SILICON.
    GALLONI, R.
    FAVERO, L.
    CARABELAS, A.
    1600, (V 68):
  • [36] ENHANCED DIFFUSION IN BORON IMPLANTED SILICON.
    Hopkins, L.C.
    Seidel, T.E.
    Williams, J.S.
    Bean, J.C.
    1985, (132)
  • [37] ELECTRICALLY ACTIVE DEFECTS IN SOLID-PHASE EPITAXIAL SILICON
    FARROW, RC
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1987, (87): : 697 - 702
  • [38] Solid solubility and diffusion of boron in single-crystalline cobalt disilicide
    Zaring, C
    Pisch, A
    Cardenas, J
    Gas, P
    Svensson, BG
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (05) : 2742 - 2748
  • [39] DIFFUSION AND SOLUBILITY OF COBALT IN SILVER
    BERNARDINI, J
    COMBEBRU.A
    CABANE, J
    SCRIPTA METALLURGICA, 1970, 4 (12): : 985 - +
  • [40] Solubility and diffusion of cobalt in alumina
    Gontier-Moya, EG
    Erdélyi, G
    Moya, F
    Freitag, K
    PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 2001, 81 (11): : 2665 - 2673
12345