X-RAY DIFFRACTOMETER CONTROL OF FILM AND FOIL THICKNESS.

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作者
Kolerov, O.K.
Logvinov, A.N.
Mishin, M.I.
Skryabin, V.G.
Yushin, V.D.
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FILMS - Thickness Measurement;
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摘要
Determination of the thicknesses of films, foils and coatings with general-purpose X-ray diffractometers is based on absorption by the material of the object being checked by rays diffracted by the substrate material. A method is obtained which provides continuous thickenss control with automatic rejection. The method is recommended for checking the thickness of amorphous, single-crystal, polycrystalline, and multilayer films and foils as well as for production and processing of the indicated materials.
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页码:1082 / 1074
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